The 3GeV synchrotron radiation facility NanoTerasu, which has been started operation from April 2024, is a facility incorporating the latest accelerator technology, and has an accelerating cavity and structure manufactured by Mitsubishi Heavy Industries Machinery Systems, Ltd. (MHI-MS). Accelerating cavities structures are precision devices that require high precision in machining, assembly, and adjustment. Over the years, MHI-MS has contributed to the construction of accelerator facilities by providing components and has continued to improve its manufacturing technology. This report focuses on the manufacturing technology MHI-MS has developed.